The problem was found with Meteor nodejs, which after update was change from arm64 to incorrect x64 platform. Current nodejs platform you can simple validate by: meteor node -p "process.arch" (correct result for M1: arm64)

If the result is incorrect (x64) continue by following steps:

1. Reinstall Meteor.js

cd
rm -rf meteor
curl https://install.meteor.com/\?release\=3.1 | sh
cd <your project folder>
rm -rf node_modules package-lock.json
meteor update
meteor update --all-packages
meteor npm install

2. Install canvas prerequisities

brew install pkg-config cairo pango libpng jpeg giflib librsvg pixman

3. Install and rebuild canvas package

meteor npm install canvas
meteor npm rebuild canvas --from-source-code

4. Validate canvas package

node -e "require('canvas')"
// result must be empty (without Error message)

Thanks a lot for help to @errorau