I was facing same issue and didn't initially understand how to solve it.

Then, I realized that when I first generated the delta token using the API endpoint /me/calendarView/delta?startDateTime={start_datetime}&endDateTime={end_datetime},

the start_datetime and end_datetime values were out of range. The first time I generated the token, it was within a different range, but when I tried to use that delta token later, I encountered the problem

I was using this API call:

https://graph.microsoft.com/v1.0/me/calendarView/delta?startDateTime=2024-01-01T19:00:00.0000000&endDateTime=2024-01-01T23:59:00.0000000,

but I was creating events in 2025, which caused the issue.