I think you are missing an equal sign for the .FormulaR1C1
here is one Sub that should work:
Sub Macro12()
'
' Macro12 Macro
'
Dim i As Integer
For i = 1 To 64
Cells(i, 1).FormulaR1C1 = "=<Element Index=""[" & (i + 1) &"]"" Value=""0""/>"
Next i
End Sub
As @VBasic2008 pointed out, this should give you <Element Index="[2]" Value="0"/>
in A1.